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Sapphire (200μm >)

  • Diameter: 150 mm
  • Wafer material: Sapphire
  • Thickness: 250 µm
  • Die pitch: 2725 µm x 1770 µm
  • Street width: 140 µm

Results

  • Scribe width: 13.3 – 14.8 µm
  • Burr height: < 3 µm
  • UPH : 8 – 10

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