SAW-Filters: LiTaO3/LiNbO3

  • Diameter: 100 mm
  • Wafer material: LiTaO3 / LiNbO3
  • Thickness: 190 µm
  • Die pitch: 828 µm x 1234 µm
  • Street width: 65 µm

Results

  • Dicing width: 25 µm
  • UPH : 3.5

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