Multi-Beam Matrix grooving process allows full removal (grooving) of the top layers (Low-K, Metals, passivation, etc). The Multi-Beam Matrix grooving process creates a U-Shape groove profile with consistent industry standard quality (low burr, no chipping, smooth groove profile, Low HAZ).
The technology used enables large variety of grooving widths. Ranging from 10µm up to 150µm or more due to wide selection of multi beam matrix configurations.